Synthesis and properties of KTN films by sol-gel deposition and RF-magnetron sputtering


Tunaboylu B. , Sashital S., Harvey P., Esener S.

FERROELECTRICS LETTERS SECTION, cilt.28, ss.75-84, 2001 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 28
  • Basım Tarihi: 2001
  • Doi Numarası: 10.1080/07315170108202951
  • Dergi Adı: FERROELECTRICS LETTERS SECTION
  • Sayfa Sayıları: ss.75-84

Özet

Homogeneous KTN (Potassium Tantalate Niobate) solutions were prepared using potassium acetate and metal alkoxides in 2-methoxyethanol by controlled hydrolysis with 1:2 (KTN/H2O) molar ratio. We report on the synthesis of sol-gel KTN for both the fabrication of homogeneous, dense and stoichiometrically correct ceramic discs by hot isostatic pressing and the deposition of spin-on as well as sputtered thin films. The spin-on KTN films on Pt/Si or r-sapphire were polycrystalline and stoichiometric, however, sputtered films on sapphire were fully (100) oriented and polycrystalline on Pt/SiO2/Si substrates with some potassium deficiency. The refractive indices of sputtered, dense KTN films on sapphire were between 2.00 and 2.05.