Hollow Cathode Plasma Assisted Atomic Layer Deposition of Wurtzite InN and InxGa1 xN Thin Films with Low Impurity Content

Haider A., Kizir S., Ozgit Akgun C., Goldenberg E., ALEVLİ M. , OKYAY A. K. , ...Daha Fazla

American Vacuum Society 62nd international symposium, 18 - 23 Ekim 2015

  • Yayın Türü: Bildiri / Özet Bildiri