Hollow Cathode Plasma Assisted Atomic Layer Deposition of Wurtzite InN and InxGa1 xN Thin Films with Low Impurity Content

Haider A., Kizir S., Ozgit Akgun C., Goldenberg E., ALEVLİ M., OKYAY A. K., ...More

American Vacuum Society 62nd international symposium, 18 - 23 October 2015, (Summary Text)

• Publication Type: Conference Paper / Summary Text
• Marmara University Affiliated: Yes