Phase stepping optical profilometry using fiber optic Lloyd's mirrors


Kosoglu G. , Yuksel H., Inci M. N.

APPLIED OPTICS, vol.55, no.4, pp.846-852, 2016 (Journal Indexed in SCI) identifier identifier identifier

  • Publication Type: Article / Article
  • Volume: 55 Issue: 4
  • Publication Date: 2016
  • Doi Number: 10.1364/ao.55.000846
  • Title of Journal : APPLIED OPTICS
  • Page Numbers: pp.846-852

Abstract

A three-step phase stepping profilometry based on a fiber optic Lloyd's mirror assembly is employed in the optical profilometry for the first time to measure the shapes of 3D objects. Required pi/2 phase shifts for interference fringe pattern are obtained by mechanically sliding the Lloyd assembly via an ordinary micrometer stage. The experimental setup is simple and low cost to construct, and is insensitive to the ambient temperature fluctuations and environmental vibrations that cause unwanted effects on the projected fringe pattern. Consecutive interfero-grams are captured by a CCD camera and are processed with an algorithm to accomplish 3D topographies. (C) 2016 Optical Society of America