Fabrication and characterization of ZnBo-based ultrasonic transducers for potential cardiovascular sensing applications
Physica Scripta, cilt.101, sa.43, 2026 (SCI-Expanded, Scopus)
- Yayın Türü: Makale / Tam Makale
- Cilt numarası: 101 Sayı: 43
- Basım Tarihi: 2026
- Doi Numarası: 10.1088/1402-4896/aeb5b7
- Dergi Adı: Physica Scripta
- Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus, Chemical Abstracts Core, Compendex, INSPEC, zbMATH
- Anahtar Kelimeler: piezoelectric materials, transducer, ultrasonic bio-sensor, ZnBO
- Açık Arşiv Koleksiyonu: AVESİS Açık Erişim Koleksiyonu
- Marmara Üniversitesi Adresli: Evet
Özet
Cardiovascular diseases, driven primarily by hypertension and atherosclerosis, remain a leading cause of mortality worldwide. Long-term continuous monitoring of blood pressure waveforms is essential for early diagnosis and clinical intervention. In this study, we report the first fabrication and characterization of boron-doped zinc oxide (ZnBO)-based ultrasonic transducers designed for invasive (e.g. catheter-based) and noninvasive (e.g. external sensors) cardiovascular blood pressure measurements. Transducer devices with a Si/Zn0.95-XB0.05O/Ti/Au stack architecture were fabricated on self-oxidizing Si(100) substrates via the sol-gel dip-coating method and magnetron sputtering. The surface morphology and elemental composition of the ZnBO films were examined in detail using scanning electron microscopy and energy-dispersive x-ray analysis. In addition, the crystal structure and phase composition of the ZnBO films were analyzed using x-ray diffraction. The electrical characterization of the fabricated ZnBO-based ultrasonic transducers was performed autonomously using a LabVIEW interface under a 500 kHz sinusoidal excitation wave. The fabricated transducers generated substantial output voltages of up to +3 V and −4 V with minimal wave distortion, matching the transducer performance and −6 dB fractional bandwidth requirements demanded by advanced cardiovascular monitoring systems.