Visible/infrared refractive index and phonon properties of GaN films grown on sapphire by hollow-cathode plasma-assisted atomic layer deposition


Gungor N., ALEVLİ M.

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, cilt.37, sa.5, 2019 (SCI İndekslerine Giren Dergi) identifier identifier

  • Cilt numarası: 37 Konu: 5
  • Basım Tarihi: 2019
  • Doi Numarası: 10.1116/1.5097467
  • Dergi Adı: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films