Microfabrication Processes in Semiconductor Industry


Teker K.

in: Micro-Manufacturing: Design and Manufacturing of Micro- Products, Muammer Koç,Tugrul Özel, Editor, Wiley-VCH Verlag Weinheim GmbH , New York, pp.25-43, 2011

  • Publication Type: Book Chapter / Chapter TextBook
  • Publication Date: 2011
  • Publisher: Wiley-VCH Verlag Weinheim GmbH
  • City: New York
  • Page Numbers: pp.25-43
  • Editors: Muammer Koç,Tugrul Özel, Editor
  • Marmara University Affiliated: No