Indium nitride nanowire growth by chemical vapor deposition and electrical characterization

Teker K. , Ali Y. A. , Otto J.

11th Annual TechConnect World Innovation Conference and Expo, Held Jointly with the 20th Annual Nanotech Conference and Expo, and the 2017 National SBIR/STTR Conference, Washington, Amerika Birleşik Devletleri, 14 - 17 Mayıs 2017, cilt.4, ss.198-201 identifier

  • Yayın Türü: Bildiri / Tam Metin Bildiri
  • Cilt numarası: 4
  • Basıldığı Şehir: Washington
  • Basıldığı Ülke: Amerika Birleşik Devletleri
  • Sayfa Sayıları: ss.198-201


The III-nitrides have attracted great interest due to their wide range of applications from high efficiency solid-state lighting and photovoltaics to high-power and high temperature electronics. This paper presents a detailed study of InN nanowire morphology changes originating from the process parameters by chemical vapor deposition using In and NH3 as source materials on SiO2/Si substrates. Nickel catalysts with various forms have been used. The growth experiments have been carried out at temperatures between 800 and 1100°C under H2 as carrier gas. Significant changes in nanowire size and morphology have been observed in accordance with the variations in process parameters. The sources of these variations and the growth mechanisms are discussed. In fact, the InN nanowire diameters range from 10 nm to 250 nm; and lengths up to 50 μm depending on the catalyst initial form. The grown nanowires and devices have been characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and semiconductor parameter analyzer.