Drilling induced delamination and tool wear are two major problems in micro-drilling of CFRP laminates. Delamination is concerning the strength of the structure and must be avoided. One of the methods which is used as a preventive measure is utilization of the support plates. In this study, wear of the micro drill was investigated by taken into account the effects of support plates. Experiments with three levels of the spindle speed and feed were performed to provide the comparison between the supported and unsupported cases. Flank wear areas of the worn micro drills were used for the evaluation. It was revealed that feed was more effective on flank wear than spindle speed for both unsupported and supported cases, materials of the support plates had an influence on the flank wear, and cutting parameters were more effective on flank wear for the supported cases.