Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Atar E., Sarioglu C., Demirler U., Kayali E., Cimenoglu H.

SCRIPTA MATERIALIA, cilt.48, sa.9, ss.1331-1336, 2003 (SCI-Expanded) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 48 Sayı: 9
  • Basım Tarihi: 2003
  • Doi Numarası: 10.1016/s1359-6462(03)00019-8
  • Dergi Adı: SCRIPTA MATERIALIA
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.1331-1336
  • Anahtar Kelimeler: microindentation, residual stresses, thin films, X-ray diffraction, SHARP INDENTATION, STRAIN FIELDS, SURFACE, TIN
  • Marmara Üniversitesi Adresli: Evet

Özet

The residual stresses in ceramic thin films obtained by the indentation method have been found to be three times higher than those of the X-ray diffraction method. This discrepancy can be eliminated by setting the geometrical factor for the Vickers pyramid indenter to 1 in the relevant equation of the indentation method. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.