Residual stress estimation of ceramic thin films by X-ray diffraction and indentation techniques

Atar E., Sarioglu C. , Demirler U., Kayali E., Cimenoglu H.

SCRIPTA MATERIALIA, cilt.48, sa.9, ss.1331-1336, 2003 (SCI İndekslerine Giren Dergi) identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 48 Konu: 9
  • Basım Tarihi: 2003
  • Doi Numarası: 10.1016/s1359-6462(03)00019-8
  • Sayfa Sayıları: ss.1331-1336


The residual stresses in ceramic thin films obtained by the indentation method have been found to be three times higher than those of the X-ray diffraction method. This discrepancy can be eliminated by setting the geometrical factor for the Vickers pyramid indenter to 1 in the relevant equation of the indentation method. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.