Performance enhancement of 3C-SiC thin film UV photodetector via gold nanoparticles

Mousa H., Yildirim M. A. , Teker K.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, cilt.34, sa.9, 2019 (SCI İndekslerine Giren Dergi) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 34 Konu: 9
  • Basım Tarihi: 2019
  • Doi Numarası: 10.1088/1361-6641/ab30c0


This paper investigates the effect of Au nanoparticles on the performance of 3C-SiC thin film-based ultraviolet photodetector (SiCTF-UVPD) fabricated on Si through a very practical and cost-effective process scheme. The main parameters such as the speed, sensitivity, stability, repeatability, and reliability have been systematically studied. It was observed that the Au nanoparticles substantially improved the photodetector performance with a very high sensitivity of 6.2 x 10(4) and fast response with rise and decay times of 0.36 s and 0.67 s, respectively at a bias voltage of 20 V. The significant increase in photocurrent from the Au nanoparticles is likely due to localized surface plasmons leading to strong absorption around the Au nanoparticles. The low-cost fabrication, high stability, high sensitivity, and very fast response of the device open good opportunities towards the development of good performance SiC thin film-based photodetectors for optoelectronic applications.