Synthesis and properties of KTN films by sol-gel deposition and RF-magnetron sputtering

Tunaboylu B., Sashital S., Harvey P., Esener S.

FERROELECTRICS LETTERS SECTION, vol.28, pp.75-84, 2001 (SCI-Expanded) identifier identifier

  • Publication Type: Article / Article
  • Volume: 28
  • Publication Date: 2001
  • Doi Number: 10.1080/07315170108202951
  • Journal Name: FERROELECTRICS LETTERS SECTION
  • Journal Indexes: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Page Numbers: pp.75-84
  • Keywords: KTN thin films, sol-gel, magnetron sputtering, POTASSIUM-TANTALATE-NIOBATE, THIN-FILMS
  • Marmara University Affiliated: Yes

Abstract

Homogeneous KTN (Potassium Tantalate Niobate) solutions were prepared using potassium acetate and metal alkoxides in 2-methoxyethanol by controlled hydrolysis with 1:2 (KTN/H2O) molar ratio. We report on the synthesis of sol-gel KTN for both the fabrication of homogeneous, dense and stoichiometrically correct ceramic discs by hot isostatic pressing and the deposition of spin-on as well as sputtered thin films. The spin-on KTN films on Pt/Si or r-sapphire were polycrystalline and stoichiometric, however, sputtered films on sapphire were fully (100) oriented and polycrystalline on Pt/SiO2/Si substrates with some potassium deficiency. The refractive indices of sputtered, dense KTN films on sapphire were between 2.00 and 2.05.