EFFECT OF TEMPERATURE AND FILM THICKNESS ONRESIDUAL STRESS AND MICROSTRUCTURE OF ZnO THIN FILM


TOSUN M., ATAOĞLU Ş., İPEK C., ARDA L., BOYRAZ C.

TMT2018, Czech Republic, 18 September - 22 August 2018, vol.21, pp.53-56

  • Publication Type: Conference Paper / Full Text
  • Volume: 21
  • Country: Czech Republic
  • Page Numbers: pp.53-56