Development of MEMS for Wafer Test Systems


Tunaboylu B. , Soydan A. M.

in: MEMS Sensors - Design & Application, Siva Yellampali, Editor, IntechOpen, London, pp.189-206, 2018

  • Publication Type: Book Chapter / Chapter Research Book
  • Publication Date: 2018
  • Publisher: IntechOpen
  • City: London
  • Page Numbers: pp.189-206
  • Editors: Siva Yellampali, Editor