JOURNAL OF APPLIED PHYSICS, cilt.84, sa.10, ss.5805-5807, 1998 (SCI-Expanded)
Low-energy electron attachment to BCl3 was measured using an electron swarm technique. The parent negative ion, BCl3- was observed within a narrow electron range close to thermal energy. Previous negative ion measurements in BCl3 discharges, which yielded seemingly inconsistent results, can be shown to be self-consistent based on the present observations. (C) 1998 American Institute of Physics. [S0021-8979(98)01722-8].