Ozgit, C. Et Al. 2012. Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition. THIN SOLID FILMS , vol.520, no.7 , 2750-2755.

Ozgit, C., Donmez, I., ALEVLİ, M., & BIYIKLI, N., (2012). Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition. THIN SOLID FILMS , vol.520, no.7, 2750-2755.

Ozgit, Cagla Et Al. "Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition," THIN SOLID FILMS , vol.520, no.7, 2750-2755, 2012

Ozgit, Cagla Et Al. "Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition." THIN SOLID FILMS , vol.520, no.7, pp.2750-2755, 2012

Ozgit, C. Et Al. (2012) . "Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition." THIN SOLID FILMS , vol.520, no.7, pp.2750-2755.

@article{article, author={Cagla Ozgit Et Al. }, title={Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition}, journal={THIN SOLID FILMS}, year=2012, pages={2750-2755} }