ALEVLİ, M. Et Al. 2016. Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.34, no.1 .

ALEVLİ, M., Gungor, N., Haider, A., Kizir, S., Leghari, S. A., & BIYIKLI, N., (2016). Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.34, no.1.

ALEVLİ, MUSTAFA Et Al. "Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition," JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.34, no.1, 2016

ALEVLİ, MUSTAFA Et Al. "Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.34, no.1, 2016

ALEVLİ, M. Et Al. (2016) . "Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.34, no.1.

@article{article, author={MUSTAFA ALEVLİ Et Al. }, title={Substrate temperature influence on the properties of GaN thin films grown by hollow-cathode plasma-assisted atomic layer deposition}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}, year=2016}