ALEVLİ, M. And Gungor, N. 2020. Effect of N-2/H-2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.38, no.6 .

ALEVLİ, M., & Gungor, N., (2020). Effect of N-2/H-2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.38, no.6.

ALEVLİ, MUSTAFA, And Nese Gungor. "Effect of N-2/H-2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition," JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.38, no.6, 2020

ALEVLİ, MUSTAFA And Gungor, Nese. "Effect of N-2/H-2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.38, no.6, 2020

ALEVLİ, M. And Gungor, N. (2020) . "Effect of N-2/H-2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.38, no.6.

@article{article, author={MUSTAFA ALEVLİ And author={Nese Gungor}, title={Effect of N-2/H-2 plasma on the growth of InN thin films on sapphire by hollow-cathode plasma-assisted atomic layer deposition}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}, year=2020}