Gungor, N. And ALEVLİ, M. 2022. Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.40, no.2 .

Gungor, N., & ALEVLİ, M., (2022). Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.40, no.2.

Gungor, Nese, And MUSTAFA ALEVLİ. "Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition," JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.40, no.2, 2022

Gungor, Nese And ALEVLİ, MUSTAFA. "Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.40, no.2, 2022

Gungor, N. And ALEVLİ, M. (2022) . "Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.40, no.2.

@article{article, author={Nese Gungor And author={MUSTAFA ALEVLİ}, title={Oxygen incorporation in AlN films grown by plasma-enhanced atomic layer deposition}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}, year=2022}