ALEVLİ, M. Et Al. 2016. Influence of N2 H2 and N2 Plasma on Binary III Nitride Films Prepared by Hollow Cathode Plasma Assisted Atomic Layer Deposition. The 16th International Conference on Atomic Layer Deposition , (Dublin, Ireland).

ALEVLİ, M., Gungor, N., Ozgit Akgun, C., Haider, A., Kızır, S., & BIYIKLI, N., (2016). Influence of N2 H2 and N2 Plasma on Binary III Nitride Films Prepared by Hollow Cathode Plasma Assisted Atomic Layer Deposition . The 16th International Conference on Atomic Layer Deposition, Dublin, Ireland

ALEVLİ, MUSTAFA Et Al. "Influence of N2 H2 and N2 Plasma on Binary III Nitride Films Prepared by Hollow Cathode Plasma Assisted Atomic Layer Deposition," The 16th International Conference on Atomic Layer Deposition, Dublin, Ireland, 2016

ALEVLİ, MUSTAFA Et Al. "Influence of N2 H2 and N2 Plasma on Binary III Nitride Films Prepared by Hollow Cathode Plasma Assisted Atomic Layer Deposition." The 16th International Conference on Atomic Layer Deposition , Dublin, Ireland, 2016

ALEVLİ, M. Et Al. (2016) . "Influence of N2 H2 and N2 Plasma on Binary III Nitride Films Prepared by Hollow Cathode Plasma Assisted Atomic Layer Deposition." The 16th International Conference on Atomic Layer Deposition , Dublin, Ireland.

@conferencepaper{conferencepaper, author={MUSTAFA ALEVLİ Et Al. }, title={Influence of N2 H2 and N2 Plasma on Binary III Nitride Films Prepared by Hollow Cathode Plasma Assisted Atomic Layer Deposition}, congress name={The 16th International Conference on Atomic Layer Deposition}, city={Dublin}, country={Ireland}, year={2016}}