ALEVLİ, M. Et Al. 2011. The influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition. JOURNAL OF CRYSTAL GROWTH , vol.335, no.1 , 51-57.

ALEVLİ, M., Ozgit, C., Donmez, I., & BIYIKLI, N., (2011). The influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition. JOURNAL OF CRYSTAL GROWTH , vol.335, no.1, 51-57.

ALEVLİ, MUSTAFA Et Al. "The influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition," JOURNAL OF CRYSTAL GROWTH , vol.335, no.1, 51-57, 2011

ALEVLİ, MUSTAFA Et Al. "The influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition." JOURNAL OF CRYSTAL GROWTH , vol.335, no.1, pp.51-57, 2011

ALEVLİ, M. Et Al. (2011) . "The influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition." JOURNAL OF CRYSTAL GROWTH , vol.335, no.1, pp.51-57.

@article{article, author={MUSTAFA ALEVLİ Et Al. }, title={The influence of N-2/H-2 and ammonia N source materials on optical and structural properties of AlN films grown by plasma enhanced atomic layer deposition}, journal={JOURNAL OF CRYSTAL GROWTH}, year=2011, pages={51-57} }