Alevli, M. Et Al. 2012. Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE , vol.209 , 266-271.

Alevli, M., Ozgit, C., Donmez, I., & Biyikli, N., (2012). Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE , vol.209, 266-271.

Alevli, MUSTAFA Et Al. "Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures," PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE , vol.209, 266-271, 2012

Alevli, MUSTAFA Et Al. "Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures." PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE , vol.209, pp.266-271, 2012

Alevli, M. Et Al. (2012) . "Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures." PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE , vol.209, pp.266-271.

@article{article, author={MUSTAFA ALEVLİ Et Al. }, title={Structural properties of AlN films deposited by plasma-enhanced atomic layer deposition at different growth temperatures}, journal={PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE}, year=2012, pages={266-271} }