ALEVLİ, M. Et Al. 2015. Substrate Temperature Influence on the Properties of GaN Thin Films Grown by Hollow cathode Plasma assisted Atomic Layer Deposition. American Vacuum Society 15th Conference on Atomic Layer deposition , (Portland, United States Of America), 370.

ALEVLİ, M., Güngör, N., Ozgit Akgun, C., Kızır, S., Haider, A., Leghari, S., ... Alkis, S.(2015). Substrate Temperature Influence on the Properties of GaN Thin Films Grown by Hollow cathode Plasma assisted Atomic Layer Deposition . American Vacuum Society 15th Conference on Atomic Layer deposition (pp.370). Portland, United States Of America

ALEVLİ, MUSTAFA Et Al. "Substrate Temperature Influence on the Properties of GaN Thin Films Grown by Hollow cathode Plasma assisted Atomic Layer Deposition," American Vacuum Society 15th Conference on Atomic Layer deposition, Portland, United States Of America, 2015

ALEVLİ, MUSTAFA Et Al. "Substrate Temperature Influence on the Properties of GaN Thin Films Grown by Hollow cathode Plasma assisted Atomic Layer Deposition." American Vacuum Society 15th Conference on Atomic Layer deposition , Portland, United States Of America, pp.370, 2015

ALEVLİ, M. Et Al. (2015) . "Substrate Temperature Influence on the Properties of GaN Thin Films Grown by Hollow cathode Plasma assisted Atomic Layer Deposition." American Vacuum Society 15th Conference on Atomic Layer deposition , Portland, United States Of America, p.370.

@conferencepaper{conferencepaper, author={MUSTAFA ALEVLİ Et Al. }, title={Substrate Temperature Influence on the Properties of GaN Thin Films Grown by Hollow cathode Plasma assisted Atomic Layer Deposition}, congress name={American Vacuum Society 15th Conference on Atomic Layer deposition}, city={Portland}, country={United States Of America}, year={2015}, pages={370} }