ALEVLİ, M. And Gungor, N. 2018. Influence of N-2/H-2 and N-2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.36, no.1 .

ALEVLİ, M., & Gungor, N., (2018). Influence of N-2/H-2 and N-2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.36, no.1.

ALEVLİ, MUSTAFA, And Nese Gungor. "Influence of N-2/H-2 and N-2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition," JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.36, no.1, 2018

ALEVLİ, MUSTAFA And Gungor, Nese. "Influence of N-2/H-2 and N-2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.36, no.1, 2018

ALEVLİ, M. And Gungor, N. (2018) . "Influence of N-2/H-2 and N-2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition." JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A , vol.36, no.1.

@article{article, author={MUSTAFA ALEVLİ And author={Nese Gungor}, title={Influence of N-2/H-2 and N-2 plasma on binary III-nitride films prepared by hollow-cathode plasma-assisted atomic layer deposition}, journal={JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A}, year=2018}